Silicon nitride,with ultralow propagation loss and a wide transparency window,offers an exciting platform to explore integrated photonic devices for various emerging applications.It is appealing to combine the intrinsic optical properties of two-dimensional layered materials with high-quality optical waveguides and resonators to achieve functional devices in a single chip.Here we demonstrate a micro-ring resonator-based phase modulator integrated with few-layer MoS2.The ionic liquid is employed directly on the surface of MoS2 to form a capacitor configuration.The effective index of the composite MoS2-SiN waveguide can be modulated via adjusting bias voltages to achieve different charged doping induced electro-refractive responses in MoS2 film.The maximum effective index modulation of the composite MoS2-SiN waveguide can be achieved to 0.45×10-3.The phase tuning efficiency is measured to be 29.42 pm/V,corresponding to a VπL of 0.69 V-cm.Since the micro-ring resonator is designed near the critical coupling regime,the coupling condition between the bus waveguide and micro-ring resonator can also be engineered from under-coupling to over-coupling regime during the charged doping process.That can be involved as a degree of freedom for the coupling tailoring.The ability to modulate the effective index with two-dimensional materials and the robust nature of the heterostructure integrated phase modulator could be useful for engineering reliable ultra-compact and low-power-consumption integrated photonic devices.

HAO CHEN;ZEXING ZHAO;ZIMING ZHANG;GUOQING WANG;JIATONG LI;ZHENYUAN SHANG;MENGYU ZHANG;KAI GUO;JUNBO YANG;PEIGUANG YAN

College of Physics and Optoelectronic Engineering,Shenzhen University,Shenzhen 518060,China;Institute of Systems Engineering,AMS,Beijing 100039,China;College of Liberal Arts and Sciences,National University of Defense Technology,Changsha 410073,China

光子学研究（英文）

[1]HAO CHEN;ZEXING ZHAO;ZIMING ZHANG;GUOQING WANG;JIATONG LI;ZHENYUAN SHANG;MENGYU ZHANG;KAI GUO;JUNBO YANG;PEIGUANG YAN-.Heterogeneous integrated phase modulator based on two-dimensional layered materials)[J].光子学研究（英文）,2022(06):1401-1407

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