典型文献
Surface plasmons interference nanogratings:wafer-scale laser direct structuring in seconds
文献摘要：
It is always a great challenge to bridge the nano-and macro-worlds in nanoscience,for instance,manufacturing uniform nanogratings on a whole wafer in seconds instead of hours even days.Here,we demonstrate a single-step while extremely high-throughput femtosecond laser scanning technique to obtain wafer-scale,highly regular nanogratings on semiconductor-on-metal thin films.Our technique takes advantage of long-range surface plasmons-laser interference,which is regulated by a self-initiated seed.By controlling the scanning speed,two types of nanogratings are readily manufactured,which are produced by either oxidation or ablation.We achieve a record manufacturing speed(＞1 cm2s-1),with tunable periodicity of ∧＜1 μm.The fractional variation of their periodicity is evaluated to be as low as △∧/∧≈0.5％.Furthermore,by utilizing the semiconductor-on-metal film-endowed interference effects,an extremely high energy efficiency is achieved via suppressing light reflection during femtosecond laser nano-processing.As the fabricated nanogratings exhibit multi-functionality,we exemplify their practical applications in highly sensitive refractive index sensing,vivid structural colors,and durable superhydrophilicity.
文献关键词：
中图分类号：
作者姓名：
liao Geng;Wei Yan;Liping Shi;Min Qiu
作者机构：
Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province,School of Engineering,Westlake University,18 Shilongshan Road,Hangzhou 310024 Zhejiang Province,China;Institute of Advanced Technology,Westlake Institute for Advanced Study,18 Shilongshan Road,Hangzhou 310024 Zhejiang Province,China
文献出处：
引用格式：
[1]liao Geng;Wei Yan;Liping Shi;Min Qiu-.Surface plasmons interference nanogratings:wafer-scale laser direct structuring in seconds)[J].光：科学与应用（英文版）,2022(07):1607-1614
A类：
nanogratings,cm2s
B类：
Surface,plasmons,interference,wafer,scale,laser,direct,structuring,seconds,It,is,always,great,challenge,bridge,macro,worlds,nanoscience,instance,manufacturing,uniform,whole,instead,hours,even,days,Here,demonstrate,single,step,while,extremely,throughput,femtosecond,scanning,technique,obtain,highly,regular,semiconductor,metal,thin,films,Our,takes,advantage,long,range,surface,which,regulated,by,self,initiated,seed,By,controlling,speed,two,types,are,readily,manufactured,produced,either,oxidation,ablation,We,record,tunable,periodicity,fractional,variation,their,evaluated,be,low,Furthermore,utilizing,endowed,effects,energy,efficiency,achieved,via,suppressing,light,reflection,during,processing,fabricated,exhibit,multi,functionality,exemplify,practical,applications,sensitive,refractive,sensing,vivid,structural,colors,durable,superhydrophilicity
AB值：
0.630028
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