The nano-opto-electro-mechanical systems (NOEMS) are a class of hybrid solid devices that hold promises in both classical and quantum manipulations of the interplay between one or more degrees of freedom in optical, electrical and mechanical modes. To date, studies of NOEMS using van der Waals (vdW) heterostructures are very limited, although vdW materials are known for emerging phenomena such as spin, valley, and topological physics. Here, we devise a universal method to easily and robustly fabricate vdW heterostructures into an architecture that hosts opto-electro-mechanical couplings in one single device. We demonstrated several functionalities, including nano- mechanical resonator, vacuum channel diodes, and ultrafast thermo-radiator, using monolithically sculpted graphene NOEMS as a platform. Optical readout of electric and magnetic field tuning of mechanical resonance in a CrOCl/ graphene vdW NOEMS is further demonstrated. Our results suggest that the introduction of the vdW heterostructure into the NOEMS family will be of particular potential for the development of novel lab-on-a-chip systems.

Tongyao Zhang;Hanwen Wang;Xiuxin Xia;Ning Yan;Xuanzhe Sha;Jinqiang Huang;Kenji Watanabe;Takashi Taniguchi;Mengjian Zhu;Lei Wang;Jiantou Gao;Xilong Liang;Chengbing Qin;Liantuan Xiao;Dongming Sun;Jing Zhang;Zheng Han;Xiaoxi Li

State Key Laboratory of Quantum Optics and Quantum Optics Devices,Institute of Opto-Electronics,Shanxi University,Taiyuan 030006,China;Collaborative Innovation Center of Extreme Optics,Shanxi University,Taiyuan 030006,China;Shenyang National Laboratory for Materials Science,Institute of Metal Research,Chinese Academy of Sciences,Shenyang 110016,China;School of Material Science and Engineering,University of Science and Technology of China,Anhui 230026,China;Research Center for Functional Materials,National Institute for Materials Science,1-1 Namiki,Tsukuba 305-0044,Japan;International Center for Materials Nanoarchitectonics,National Institute for Materials Science,1-1 Namiki,Tsukuba 305-0044,Japan;College of Advanced Interdisciplinary Studies,National University of Defense Technology,Changsha 410073,China;The Key Laboratory of Science and Technology on Silicon Devices,Institute of Microelectronics,Chinese Academy of Sciences,Beijing 100029,China;The University of Chinese Academy of Sciences,Beijing 100029,China;State Key Laboratory of Quantum Optics and Quantum Optics Devices,Institute of Laser Spectroscopy,Shanxi University,Taiyuan 030006,China

光：科学与应用（英文版）

[1]Tongyao Zhang;Hanwen Wang;Xiuxin Xia;Ning Yan;Xuanzhe Sha;Jinqiang Huang;Kenji Watanabe;Takashi Taniguchi;Mengjian Zhu;Lei Wang;Jiantou Gao;Xilong Liang;Chengbing Qin;Liantuan Xiao;Dongming Sun;Jing Zhang;Zheng Han;Xiaoxi Li-.A monolithically sculpted van der Waals nano-opto-electro-mechanical coupler)[J].光：科学与应用（英文版）,2022(03):365-374

NOEMS,CrOCl

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