典型文献
An integrated front-end vertical hall magnetic sensor fabricated in 0.18 μm low-voltage CMOS technology
文献摘要：
An integrated front-end vertical CMOS Hall magnetic sensor is proposed for the in-plane magnetic field measure-ment.To improve the magnetic sensitivity and to obtain low offset,a fully symmetric vertical Hall device(FSVHD)has been op-timized with a minimum size design.A new four-phase spinning current modulation associated with a correlated double sampling(CDS)demodulation technique has been further applied to compensate for the offset and also to provide a linear Hall output voltage.The vertical Hall sensor chip has been manufactured in a 0.18 μm low-voltage CMOS technology and it occu-pies an area of 1.54 mm2.The experimental results show in the magnetic field range from-200 to 200 mT,the entire vertical Hall sensor performs with the linearity of 99.9％and the system magnetic sensitivity of 1.22 V/T and the residual offset of 60 μT.Meanwhile,it consumes 4.5 mW at a 3.3 V supply voltage.The proposed vertical Hall sensor is very suitable for the low-cost sys-tem-on-chip(SOC)implementation of 2D or 3D magnetic microsystems.
文献关键词：
中图分类号：
作者姓名：
Zhengwu Shu;Lei Jiang;Xingxing Hu;Yue Xu
作者机构：
College of Electronic and Optical Engineering&College of Microelectronics,Nanjing University of Posts and Telecommunications,Nanjing 210023,China
文献出处：
引用格式：
[1]Zhengwu Shu;Lei Jiang;Xingxing Hu;Yue Xu-.An integrated front-end vertical hall magnetic sensor fabricated in 0.18 μm low-voltage CMOS technology)[J].半导体学报（英文版）,2022(03):59-66
A类：
FSVHD,pies
B类：
An,integrated,front,end,vertical,hall,magnetic,sensor,fabricated,low,voltage,CMOS,technology,Hall,is,proposed,plane,field,measure,To,improve,sensitivity,obtain,offset,fully,symmetric,device,been,timized,minimum,size,design,new,four,phase,spinning,current,associated,correlated,double,sampling,CDS,demodulation,technique,further,applied,compensate,also,provide,output,chip,manufactured,occu,area,mm2,experimental,results,show,range,from,mT,entire,performs,linearity,residual,Meanwhile,consumes,mW,supply,very,suitable,cost,SOC,implementation,2D,microsystems
AB值：
0.501146
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